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13/22-MXQ, Precision Slide Tables (Recirculating Bearings) - Clean Room/Copper, Fluorine, Silicone-free Series

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The 13/22-MXQ, clean room precision slide table uses a specially treated Martensitic stainless steel for its table and guide block to isolate the load bearing from the movement of the dual rods and pison seals to reduce particle generation. A relief plate was added to the body to house relief bushings and a vacuum port to vacuum particles equally on both sides of the piston rods to prevent particle leakage. Silicon rubber dust covers and plugs have also been attached to the floating parts to prevent particles from leaking.

  • Bore sizes: 6, 8, 12, 16, 20, 25 mm
  • Repeatable positioning accuracy: +/-0.05mm
  • Stroke adjuster options: rubber or metal stopper
  • PTFE grease used in Clean Room Series
  • Lithium grease used in Copper, Fluorine, Silicone-free Series
  • RoHS compliant
  • Auto switch capable
Configuration Options
  
 
Copy Configuration Number Copy Configuration Number
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Specification Configuration Status
Bore Configuration Status
Thread Configuration Status
Symmetric Type Configuration Status
Stroke Configuration Status
Adjuster Configuration Status
Functional Option Configuration Status
Auto Switch Configuration Status
Lead Wire Configuration Status
Number Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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