The 13/22-MXQ, clean room precision slide table uses a specially treated Martensitic stainless steel for its table and guide block to isolate the load bearing from the movement of the dual rods and pison seals to reduce particle generation. A relief plate was added to the body to house relief bushings and a vacuum port to vacuum particles equally on both sides of the piston rods to prevent particle leakage. Silicon rubber dust covers and plugs have also been attached to the floating parts to prevent particles from leaking.

The 13-MXS is a clean room, precision slide table integrated with guides and rails combined with cross roller bearings to isolate the load bearing from the movement of the dual rods and piston seals. Its surfaces are electroplated using RAYDENT treatment technology, completely integrating the RAYDENT coating with the base metal so the semi-permanent coating will not separate or exfoliate. A relief plate was added to the body to house relief bushings and a vacuum port to vacuum particles equally on both sides of the piston rods to prevent particle leakage. Silicon rubber dust covers and plugs have also been attached to the floating parts to prevent particles from leaking.

The 13-MXS*L is a clean room, precision slide table integrated with guides and rails combined with cross roller bearings to isolate the load bearing from the movement of the dual rods and piston seals. The ports and stroke adjuster positions are located opposite from the 13-MXS, clean room type in a symmetrical or mirror image of each other to minimize clearance for adjacent mounting applications. Its surfaces are electroplated using RAYDENT treatment technology, completely integrating the RAYDENT coating with the base metal so the semi-permanent coating will not separate or exfoliate. A relief plate was added to the body to house relief bushings and a vacuum port to vacuum particles equally on both sides of the piston rods to prevent particle leakage. Silicon rubber dust covers and plugs have also been attached to the floating parts to prevent particles from leaking.

The 11/22-MXP clean room, high precision slide tables have travelling parallelism of 0.004 mm for all its bore sizes and non-rotating accuracy +/-0.03° for 6 and 10 mm bore sizes and non-rotating accuracy +/-0.04° for 12 and 16 mm bore sizes. Its actuator body and guide block are made from Martensitic stainless steel for high rigidity and integrated to guide rails for isolating the load bearing from the movement of the piston rod and seals. A vacuum relief port has been added to suction any particles so no dust can be released into the clean room. A dust cap over the piston end cap further prevents dust generation. A special PTFE grease has been applied to 11-MXP's linear guide and piston to inhibit dust generation. A special lithium grease has been applied to 22-MXP's linear guide and piston to inhibit dust generation. For 22-MXP, additionally, copper is not used as a product material as well as substances including halogen (fluorine, chlorine, bromine and iodine) or compounded with silicon are not used.

The 11-MXJ miniature precision slide table provides travelling parallelism of 0.005 mm in a compact package, height: 10 mm and width: 20mm for the 4 mm bore size. . Its actuator body and guide block are made from Martensitic stainless steel for high rigidity and integrated to guide rails for isolating the load bearing from the movement of the piston rod and seals. A special PTFE grease has been applied to both the linear guide and piston to inhibit dust generation. A vacuum relief port, which can be specified on either the right or left-side of the body, has been added to suction any particles so no dust can be released into the clean room. The ports and switch grooves can also be specified on either the right or left-side of the body, in a symmetrical location in order to minimize side clearance for adjacent mounting applications.

The 11/22-MXPJ6 miniature high precision slide table provides travelling parallelism of 0.004 mm and non-rotating accuracy of +/-0.03° in a compact package, height: 17 mm and width: 20mm. Its actuator body and guide block are made from Martensitic stainless steel for high rigidity and integrated to guide rails for isolating the load bearing from the movement of the piston rod and seals. A vacuum relief port has been added to suction any particles so no dust can be released into the clean room. A dust cap over the piston end cap further prevents dust generation. A special PTFE grease has been applied to 11-MXPJ6's linear guide and piston to inhibit dust generation. A special lithium grease has been applied to 22-MXPJ6's linear guide and piston to inhibit dust generation. For 22-MXPJ6, additionally, copper is not used as a product material as well as substances including halogen (fluorine, chlorine, bromine and iodine) or compounded with silicon are not used.