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XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance

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High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Particulates are reduced because there are no sliding metal parts
  • Pressure balance mechanism allows unrestricted exhaust direction
  • Can be used in portable equipment since air for drive is not required
  • A control power supply circuit for solenoid valve drive has been made standard
Configuration Options
  
 
Kopirajte broj konfiguracije Kopirajte broj konfiguracije
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Valve Size Configuration Status
Control Power Supply Configuration Status
Voltage Configuration Status
Electrical Entry Configuration Status
CE Marked Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Options in:
  • Sivo nije kompatibilno sa drugim izabranim vrednostima.
  • Crveno neusaglašeno je sa drugom izabranom vrednošću.
  • Narandžasto nije preporučeno.

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