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XLDV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve

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High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Light weight and compact
  • Uniform baking temperature
  • High fluorine resistance
  • Low outgassing
  • Little heavy metal contamination
Configuration Options
  
 
Copy Configuration Number Copy Configuration Number
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Valve Type Configuration Status
Flange Size Configuration Status
Flange Type Configuration Status
Valve Direction Configuration Status
Auto Switch Configuration Status
Lead Wire Configuration Status
Number Configuration Status
Voltage Configuration Status
Electrical Entry Configuration Status
Surge Suppressor Configuration Status
Non-standard Indicator Configuration Status
Body Surface Treatment Configuration Status
Seal Material Configuration Status
Seal Replacement Configuration Status
CE-Compliant Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

Downloads

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CAD Downloads

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