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HRZ, High Performance Specialty Chiller, Double Inverter Type

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HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. This model includes an energy-saving inverter compressor and inverter pump, achieving lower power consumption and requiring a lower average flow rate of facility water for refrigerant heat extraction. 10 kW of cooling capacity is available at 20°C coolant set point. Multiple coolant types can be selected for this model.

  • Cooling capacity: 10kW
  • Temperature range setting:
    -20 to 90°C (fluorinated or ethylene glycol coolants)
    -10 to 60°C (clear or deionized water coolant)
  • Temperature stability: ±0.1°C
  • Power supply requirement: 3-phase 200 VAC / 50Hz or 3-phase 200~208 VAC / 60Hz
  • Standards: CE, UL, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)
Configuration Options
  
 
Copy Configuration Number Copy Configuration Number
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Circulating Fluid Configuration Status
Option Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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