Clean series 10-AW filter regulators have fluorine grease, are assembled and inspected in a workshop, and have clean packaging (products are sealed in anti-static double bags after the surface has been blown with clean air).  The 10-AW series has a particle generation grade of 1, and is available with port sizes from 1/8 to 3/4 (Rc, G or NPT threads).

Clean series 10-AR regulators have fluorine grease, are assembled and inspected in a workshop, and have clean packaging (products are sealed in anti-static double bags after the surface has been blown with clean air).  The 10-AR series has a particle generation grade of 1, and is available with port sizes from 1/8 to 1 (Rc, G or NPT threads).

The ARP is a modular style, direct operated precision regulator.  A locking adjustment knob allows the pressure to be set, and then locked to prevent accidental setting changes. The ARP20/30/40 series is available with a backflow function that exhausts the air pressure in the outlet side reliably and quickly.  Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water.

Clean regulator series SRH is a contamination controlled stainless steel regulator designed to minimize residual fluid. Design includes an intake/exhaust port in the diaphragm compartment, which facilitates flow. SRH has outstanding corrosion resistance. All metal parts in contact with fluid use stainless steel SUS316.

High precision, low flow consumption, stainless steel regulator SRP has excellent corrosion resistance. SUS316 is used for all metal parts in contact with the fluid. Consistent clean room production is achieved by cleaning, assembling, inspecting, and sealing in double packaging in a class 10,000 environment.

Clean series 10-AF air filters have fluorine grease, are assembled and inspected in a workshop, and have clean packaging (products are sealed in anti-static double bags after the surface has been blown with clean air).  The 10-AF series has a particle generation grade of 1, and is available with port sizes from 1/8 to 1 (Rc, G or NPT threads).

SF series clean air filters are available as cartridge type or disposable type models.  The filtration level is 0.01 micron (filtering efficiency of 99.99%) on units with membrane elements.  The SFB20, with a sintered metallic element, has a nominal filtration of 120 micron.  The SF series can be used under different environments with chemical resistant and heat resistant materials (refer to catalog specifications for each series).

Clean Air Module series LLB, available in a standard or high flow type, was designed to easily obtain clean air.  The space-saving module design reduces piping man-hours.  The series is assembled and double-packed in a clean room environment.  Available in 24 variations the LLB offers a nominal filtration rating of 0.01 µm.  Parts in contact with fluid are grease-free and silicon-free.  Options include digital flow switch, regulator, ON/OFF valve, and restrictor.