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AZ3542 & AZ4542, Diaphragm Valve, Air Operated

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Series AZ is an ultra high purity (UHP)diaphragm valve for gas delivery in semiconductor and other clean industries.  This series is available in air operated.

  • Cleaned for high purity semiconductor applications
  • Cleanroom assembled and Helium leaked tested
  • Valve meets dimensional requirements of SEMI F36-0299, Option 1
  • User-friendly forged body
  • M5 actuation port
  • Compact and lightweight
Configuration Options
  
 
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Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Size Configuration Status
Ports Configuration Status
Inlet Connection Configuration Status
Outlet Connection Configuration Status
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Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Options in:
  • 灰色 与其他选定的选项值不兼容。
  • 红色 与另一个选定的选项值冲突。
  • 琥珀色 不推荐

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