13-MXS clean room air slide tables, rated for contamination grade 3, are great for applications that call for precise movement ranging from 10-150mm typically requiring a cylinder and precision guide. The MXS is available in 6 bore sizes, each with set stroke lengths and is standard with auto-switch capability.

The MXJ air slide table's integrated front mounting part and table result in a highly accurate, rigid top and front mounting surface. Clean specification styles are available with no dimensional changes.  Several options are available for both the standard and the clean series MXJ.  These options include a symmetric style, stroke adjusters, axial piping and auto switches.

The MXP is ideal for clean room applications and those that require high precision movement in short travel situations. The precision slide table has a machined guide with very tight tolerances that operates in conjunction with highly accurate recirculating ball bearings. This slide is capable of achieving parallelism within 0.02mm and non-rotation accuracy as low as 0.03 degrees. Two of the mounting surfaces allow work to be held to a tolerance +/-0.05mm plus the tolerance of the work piece. The slide contains two pistons that operate independently to supply the movement of the actuator.

Clean series 13/22-MXQ is an air slide table actuator available in 6, 8, 12, 16, 20 and 25 bore sizes.  This slide table is a double acting, non-lube type, with operatiang pressure at 0.15 to 0.7MPa.  It is also available with Rc, NPT, or G ports.  Particle generation measurement test classify the 13/22-MXQ as grade 3, 4 which is determined by the type of adjuster option that is selected.  After inspection, the 13/22-MXQ is blown with high purity air (clean bench/class M3.5) in a clean environment.  It is then sealed and shipped in an anti-static double bag.

Clean series 10-MGF is a guide table type actuator available in 40, 63 and 100mm bore sizes.  This guide table is a double acting, non-lube type, available with Rc, NPT or G ports.  Particle generation measurement tests classify the 10-MGF clean series as grade 2.  After inspection, the 10-MGF is blown with high purity air (clean bench/class M3.5) in a clean environment.  It is then sealed and shipped in an anti-static double bag.

SMC's clean room version of the CXS dual rod cylinder is available in 6 bore sizes (6, 10, 16, 20, 25 and 32mm) with stroke lengths up to 100mm. It is suited for accurate pick-and-place applications or light duty material handling.  The CXSJ, compact, dual rod cylinder is available in 2 bore sizes (6mm and 10mm) with strokes up to 50mm.  Both the CXS and the CXSJ can be used with either reed or solid state switches.