SL5500, Single Stage Regulator for Ultra High Purity, Low Flow

Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.
- For UHP gas delivery
- Flow capacity to 30 slpm
- Body material: 316L SS secondary remelt
- Hastelloy® internals available for corrosion resistance
- Sub-atmospheric pressure delivery option
Options in:
- šedý není kompatibilní s vybraným optionem
- červený konflikt z jinou vybranou hodnotou
- Amber není doporučeno
Ke stažení
Číslo dílu je nutné doplnit do objednávky pro prohlížení/stažení CAD modelu.